HIGH FREQUENCY PERMEABLE MATERIAL AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a high frequency permeable material which does not contain impurities to adversely affect a material to be treated, such as a wafer, has excellent corrosion resistance and is nontoxic and a method of manufacturing the high frequency permeable material which is capable of inexpensively and efficiently manufacturing the high frequency permeable material having such characteristics.;SOLUTION: The high frequency permeable material is so constituted as to consist of a silicon carbide-base sintered compact which substantially consists of silicon carbide and is ≤1,000 ppm in the total content of elements exclusive of silicon and carbon, ≤100 ppm in the content of free carbon and ≥1×109 Ωcm in specific volumetric resistivity value. The method of manufacturing the same is constituted to obtain the silicon carbide-base sintered compact having sintered compact density of ≤95% by sintering a powder mixture composed of 1 to 3 wt.% boron nitride powder and the balance silicon carbide powder of ≤10,000 ppm in the content of the free carbon and to heat-treat the silicon carbide-base sintered compact, from which the surface reaction layer is removed, at 1,900 to 2,300°C in an inert atmosphere after the surface reaction layer of the silicon carbide-base sintered compact is removed.;COPYRIGHT: (C)2002,JPO