CLEANING AGENT, METHOD FOR PRODUCING THE CLEANING AGENT, APPARATUS FOR PRODUCING THE CLEANING AGENT AND CLEANING METHOD USING THE CLEANING AGENT

摘要

PROBLEM TO BE SOLVED: To provide an industrial cleaning agent having high safety and excellent in cleaning performance. SOLUTION: The cleaning agent contains an electrolytic water obtained by applying voltage on pure water after adding citric acid using an electrolytic auxiliary adding device 15. Thus, troubles regarding the safety to human body are completely removed, and especially in the cleaning of a polishing apparatus for semiconductor or the like in which mixing of metallic ion (alkali metal) is extremely disadvantageous, an influence of such pollutant is completely removed, and further, high cleaning performance is acquired.