WICKET, WICKET CONVEYOR AND WICKET CONVEYOR DRYING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a wicket which transferrs multiple substrates in a short time.;SOLUTION: A plurality of support slots 51 are formed straight inline with a base part 53 as a base plate 55. The support slot 51 has a left guide part 71 and a right guide part 81. A transport object 61 is inserted by the guide grooves of the left guide part 71 and the right guide part 81. Even if the transport object 61 is small and thin, it is supported by the guide grooves of the left guide part 71 and the right guide part 81 and is transferred safely.;COPYRIGHT: (C)2002,JPO