DISLOCATION DETECTING DEVICE FOR OBJECT TO BE PROCESSED, PROCESSING SYSTEM AND DISLOCATION DETECTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a dislocation detecting device of an object to be processed, which detects the dislocation quantity of the object without having to stop the transport operation of the object and can improve the throughput.;SOLUTION: In the detecting device, the dislocation of the object with respect to a transport mechanism 42 holding the disk-like object W, in which a notch part for recognizing a direction is formed in a peripheral part is detected. The device is provided with image sensors means 62A and 64A capturing the image of the transfer mechanism and that of the object, which is kept by the transfer mechanism, and dislocation quantity operation parts 62B and 64B obtaining a reference original mark, which has previously been decided in the transfer mechanism and two reference points which have previously been decided in the object, based on image information taken in by the image sensor means and calculating the dislocation quantity of the object.;COPYRIGHT: (C)2002,JPO