COMPOSITION DISTRIBUTION STEREOSCOPIC DISPLAY ATOM PROBE AND SCANNING TYPE COMPOSITION DISTRIBUTION STEREOSCOPIC DISPLAY ATOM PROBE

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive device with a simple structure and an easy operation capable of enlarging an analyzing area of sample and enhancing a resolving power of ion at an electric field evaporation position to an atom level in an atom probe or a scanning type atom probe in which an electric field ion microscope and an ion detector are combined.;SOLUTION: A meander-shape delay line type position sensor obtained by superposing a plane-like X axis direction electric signal delay line bent to a meander-shape in an X axis direction and a plane-line Y axis direction electric signal delay line bent to a meander-shape in a Y axis direction such that the X axis and the Y axis become a perpendicular relationship is arranged at a flying area of the electric field evaporation ion as an electric field evaporation position sensor of the ion from an analyzing area of the sample.;COPYRIGHT: (C)2002,JPO