NEAR FIELD PROBE, MANUFACTURING METHOD OF NEAR FIELD PROBE AND NEAR FIELD MICROSCOPE USING NEAR FIELD PROBE

摘要

PROBLEM TO BE SOLVED: To provide a near field probe which is used for either measurement of a degree of depolarization, polarization and polarization dependence of a spectrum in a region smaller than the value of a wavelength of light.;SOLUTION: The feature of the near field probe 14 is to provide these parts; a light guiding part which is made of a transparent material for the excitation light which generates the near field light at a tip of probe 14 and for the measured light from a sample measurement surface, and guides the excitation light and the measured light, a mask 52 which is made of an opaque material for the excitation light and measured light and formed at least in the tip surface of the light guiding part and an ellipsoid or slit opening 26 which is formed in the tip head of the light guiding part where the mask 52 is formed, with which the near field light generated in the tip is irradiated at the sample measurement surface as the linear polarization with a fixed oscillation direction and the measured light from the sample measurement surface obtained by the light irradiation is collected as the linear polarization with a fixed oscillation direction.;COPYRIGHT: (C)2002,JPO