FACTORY AIR-CONDITIONING FILTER SYSTEM AND FACTORY AIR- CONDITIONING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an advanced air-cleaning filter system by reducing loads on an HEPA filter and a ULPA filter without lowering the life of a high efficiency filter.;SOLUTION: A filter using an electret nonwoven fabric obtained by the melt-blowing method is connected to the HEPA filter and/or the ULPA filter in series. By using this filter system as a moderate/high efficiency filter, high collection effect is realized and the lives of the HEPA filter and the ULPA filter are prolonged, so that a filter system suitable for a clean room can be provided.;COPYRIGHT: (C)2002,JPO