COMPOSITE FERROELECTRIC THICK FILM, METHOD OF FORMING COMPOSITE FERROELECTRIC THICK FILM, AND CAPACITOR AND PYROELECTRIC ELEMENT USING IT

摘要

PROBLEM TO BE SOLVED: To easily form a composite ferroelectric substance thick film, in which temperature characteristics of a specific dielectric constant is flat, and a composite ferroelectric substance in which temperature characteristics of a pyroelectric coefficient is flat, at low temperatures without giving considerable loads to the environment.;SOLUTION: Two compositions of ferroelectric substance materials composed of lead lanthanum zirconate titanate (PLZT), PLZT (9/65/35) having Curie point of 73C, and PLZT (7.5/30/70) having Curie point of 330C are formed into the composite ferroelectric substance thick film having a thickness of 2 to 100 m in a condition of a maximum process temperature of 600C. In the resultant composite film, the two components are coexisted, and diffraction peaks resulted from the two components can be obtained, and uniformity of a solid solution is not generated. A composite film formed from two composition of lead zirconate titanate (PZT), PZT (95/5) and PZT (90/10) in a condition at a maximum process temperature of 600C has the same effects.;COPYRIGHT: (C)2001,JPO