Micromechanical tunable capacitor and an integrated tunable resonator

摘要

The invention relates to an arrangement for an integrated tunable resonator for radio and a method for producing the same. In particular the invention relates to an RF resonator realized with a micromechanical tunable capacitor with high Q- (quality factor) value and a method for fabricating the same. In one particular embodiment of the arrangement in accordance with the invention the first conducting layer (4) forms the first capacitor electrode (8), and/or the electrodes (9) to create the electrostatic force on the movable micromechanical structure (2), and the interconnecting wire (10) between the inductor coil (1) and the capacitor electrode. The invention presents a substantial improvement to the linearity, power consumption, occupation space and reliability of RF resonator circuits.