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Pellicle, photomask, pellicle frame, and method for manufacturing pellicle

机译:薄膜组件,光掩模,薄膜组件框架以及薄膜组件的制造方法

摘要

A pellicle for protecting a reticle, on which a circuit pattern is formed for manufacturing a semiconductor device, from an attachment of a foreign matter, comprising: a pellicle film having a predetermined thickness, through which a light transmits to the reticle; and a pellicle frame, on which a periphery of the pellicle film contacts, including: a body part having a frame shape, the height of which is substantially constant all over the body part; and an upper protruding part formed on an upper end of the body part that protrudes upward from the upper end of the body part for directly contacting with a surface of the pellicle film, the height of the upper protruding part being constant all over the upper protruding part.
机译:一种用于保护掩模版的防护膜,其上形成有用于制造半导体器件的电路图案,以防止异物附着,该防护膜包括:具有预定厚度的防护膜,光通过该膜透射至掩模版;和防护膜框架,防护膜框架的外周与防护膜框架接触,该防护膜框架包括:框状的主体部,其高度在整个主体部上大致恒定。在主体部的上端形成有上部突出部,该上部突出部从主体部的上端向上方突出而与防护薄膜的表面直接接触,并且上部突出部的高度在整个上部突出部上是一定的。部分。

著录项

  • 公开/公告号US2002090558A1

    专利类型

  • 公开/公告日2002-07-11

    原文格式PDF

  • 申请/专利权人 SHIRASAKI TORU;

    申请/专利号US20010016628

  • 发明设计人 TORU SHIRASAKI;

    申请日2001-12-17

  • 分类号G03F9/00;B44F1/00;A47G1/12;

  • 国家 US

  • 入库时间 2022-08-22 00:52:33

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