首页>
外国专利>
Silica with low compaction under high energy irradiation
Silica with low compaction under high energy irradiation
展开▼
机译:高能辐照下低致密度的二氧化硅
展开▼
页面导航
摘要
著录项
相似文献
摘要
Fused silica stepper lens for photolithographic application is disclosed which is resistant to laser-induced damage, specifically, compaction or densification which can lead to an increase in the optical path length of the lens.
展开▼