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Micromachined tuned-band hot bolometer emitter
Micromachined tuned-band hot bolometer emitter
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机译:微机械调谐波段热辐射计发射器
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摘要
A device for utilizing an optical infrared emitter/detector to sense substances of interest is provided. The infrared emitter/detector comprises a single crystal semiconductor, photonic band gap structure which functions both as an infrared emitter, a narrow-band filter, and as a broad-band infrared bolometer detector to exert wavelength control directly on the active element emitter/detector surface using the periodic symmetry of the photonic band gap structure to produce narrow wavelength “forbidden” optical transmission bands or modes to sense the presence of a specified substance in the environment. A system and method for sensing specific substances using the optical infrared emitter/detector of this invention in a sensor device is also provided. Finally, a method of manufacturing the infrared emitter/detectors of the present invention is also provided.
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