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Micromachined tuned-band hot bolometer emitter

机译:微机械调谐波段热辐射计发射器

摘要

A device for utilizing an optical infrared emitter/detector to sense substances of interest is provided. The infrared emitter/detector comprises a single crystal semiconductor, photonic band gap structure which functions both as an infrared emitter, a narrow-band filter, and as a broad-band infrared bolometer detector to exert wavelength control directly on the active element emitter/detector surface using the periodic symmetry of the photonic band gap structure to produce narrow wavelength “forbidden” optical transmission bands or modes to sense the presence of a specified substance in the environment. A system and method for sensing specific substances using the optical infrared emitter/detector of this invention in a sensor device is also provided. Finally, a method of manufacturing the infrared emitter/detectors of the present invention is also provided.
机译:提供了一种利用光学红外发射器/检测器感测感兴趣物质的装置。红外发射器/检测器包括单晶半导体,光子带隙结构,该结构既用作红外发射器,窄带滤光片,又用作宽带红外辐射热检测器,以直接在有源元件发射器/检测器上施加波长控制利用光子带隙结构的周期性对称性来产生“禁止”的窄波长。光学传输带或模式以检测环境中特定物质的存在。还提供了一种在传感器装置中使用本发明的光学红外发射器/检测器来感测特定物质的系统和方法。最后,还提供一种制造本发明的红外发射器/检测器的方法。

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