Pipe structure, alignment apparatus, electron beam lithography apparatus, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory

摘要

A pipe connected to a stage serving as a movable member arranged in a vacuum chamber has a double pipe structure constituted by a resin inner pipe and a resin outer pipe which covers the inner pipe including its surrounding space. The space between the inner pipe and the outer pipe is connected to a vacuum pump serving as an exhaust means. The space in the pipe is kept in vacuum by the vacuum pump.