首页>
外国专利>
Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers
Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers
展开▼
机译:静电除尘器电晕放电点火电压探头,用于气体状态检测和控制系统,用于气体放电激光器
展开▼
页面导航
摘要
著录项
相似文献
摘要
An excimer or molecular fluorine laser system is provided which emits a laser beam during operation and has a gas mixture with a gas composition initially provided within a discharge chamber. The laser system includes a discharge chamber containing a laser gas mixture at least including a halogen-containing species and a buffer gas, multiple electrodes within the discharge chamber and connected to a discharge circuit for energizing the gas mixture, a resonator for generating a laser beam, an electrostatic precipitator for having a voltage applied thereto and for receiving and precipitating contaminant particulates from a flow of the gas mixture, and a processor for monitoring the corona discharge ignition voltage of the electrostatic precipitator and for determining a status of said gas mixture based on the monitored voltage.
展开▼