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Backup control system (BCS) for optimizing utilization of multiple fabrication facilities

机译:备用控制系统(BCS),用于优化多种制造设施的利用率

摘要

Within both a method for operating a plurality of fabrication facilities and a system for operating the plurality of fabrication facilities there is providing within each of the plurality of fabrication facilities a corresponding plurality of backup control systems. Within the method and the system, each backup control system is connected with the remaining backup control systems within the remaining fabrication facilities within the plurality of fabrication facilities, and each backup control system is programmed to forward a request for fabrication in a remote fabrication facility within the plurality of fabrication facilities and receive a request for fabrication from a remote fabrication facility within the plurality of fabrication facilities. The method and the system are particularly useful for fabricating semiconductor integrated circuit microelectronic fabrications.
机译:在用于操作多个制造设施的方法和用于操作多个制造设施的系统两者中,在多个制造设施的每个内部提供对应的多个备用控制系统。在该方法和系统内,每个备用控制系统与多个制造设施内的其余制造设施内的其余备用控制系统连接,并且每个备用控制系统被编程为转发在其内的远程制造设施中的制造请求。多个制造设施,并从多个制造设施中的远程制造设施接收制造请求。该方法和系统对于制造半导体集成电路微电子制造特别有用。

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