Triple electrode MOEMS tunable filter and fabrication process therefor

摘要

A MOEMS Fabry-Perot tunable filter includes an optical membrane structure. Two electrostatic cavities are provided, one on either side of the membrane structure. As a result, electrostatic attractive forces can be exerted on the optical membrane to enable deflection in either direction, typically, along the optical axis. This is useful in calibrating the tunable filter during operation to a &lgr;∘ set point. It is also useful in controlling the membrane to avoid unstable operation.