Silicon sliders with trapezoidal shape and drie process for fabrication

摘要

A trapezoidal shaped silicon slider is described in the present invention. The slider has a first parallel surface larger than a second parallel surface, thereby generating a built-in positive pitch with respect to a recording medium when the slider is incorporated into a hard disk drive. The slider further includes round edges at the first parallel surface, longitudinal holes within its body, non-planar slanted side surfaces, and a rounded leading edge. The silicon, trapezoidal slider is fabricated using a deep reactive ion etching (DRIE) technique.