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Manufacture of target for use in magnetron sputtering of nickel and like magnetic metals for forming metallization films having consistent uniformity through life
Manufacture of target for use in magnetron sputtering of nickel and like magnetic metals for forming metallization films having consistent uniformity through life
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机译:制造用于镍及类似磁性金属的磁控溅射的靶材,以形成具有始终如一的均匀性的金属化膜
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摘要
Improved targets for use in DC magnetron sputtering of nickel or like ferromagnetic face-centered cubic (FCC) metals are disclosed for forming metallization films having effective edge-to-edge deposition uniformity of 5% (3&sgr;) or better. Such targets may be characterized as having: (a) a homogeneous texture mix that is at least 20% of a 200 texture content and less than 50% of a 111texture content, (b) an initial pass-through flux factor (%PTF) of about 30% or greater; and(c) a homogeneous grain size of about 200 &mgr;m or less.
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