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Focus detection unit and optical measuring instrument having the same

机译:焦点检测单元和具有该焦点检测单元的光学测量仪器

摘要

A focus detection unit being applicable to various workpiece and capable of reducing production cost and an optical measuring instrument having the focus detection unit are provided. The focus detection unit is for forming image of first focusing pattern and second focusing pattern onto an image surface of an optical system, projecting the image onto the workpiece, and adjusting relative position of the first focusing pattern and the second focusing pattern for focusing, the focus detection unit including: a slide plate having a plurality of pair of the first focusing pattern and the second focusing pattern; a switching member for switching the slide plate to project the image of either one of the first focusing patterns and the second pattern corresponding thereto onto the workpiece; and a projector for projecting the image of the focusing patterns switched by the switching member onto the workpiece.
机译:提供了一种适用于各种工件并能够降低生产成本的焦点检测单元和具有该焦点检测单元的光学测量仪器。焦点检测单元用于将第一聚焦图案和第二聚焦图案的图像形成在光学系统的像面上,将图像投影到工件上,并调节第一聚焦图案和第二聚焦图案的相对位置以进行聚焦,焦点检测单元包括:具有多个一对第一聚焦图案和第二聚焦图案的滑板;切换部件,其用于切换滑板以将第一聚焦图案和与之相对应的第二图案中的任一个的图像投影到工件上;投影仪,其将由切换部件切换的聚焦图案的图像投影到工件上。

著录项

  • 公开/公告号US6407800B1

    专利类型

  • 公开/公告日2002-06-18

    原文格式PDF

  • 申请/专利权人 MITUTOYO CORPORATION;

    申请/专利号US20000512772

  • 申请日2000-02-25

  • 分类号G03B275/20;G02B72/80;G02B212/60;

  • 国家 US

  • 入库时间 2022-08-22 00:48:50

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