A micro-gyroscope (10) having closed loop operation by a control voltage (VTY), that is demodulated by an output signal of the sense electrodes (S1, S2), providing Coriolis torque rebalance to prevent displacement of the micro-gyroscope (10) on the output axis (y-axis). The present invention provides wide-band, closed-loop operation for a micro-gyroscope (10) and allows the drive frequency to be closely tuned to a high Q sense axis resonance. A differential sense signal (S1−S2) is compensated and fed back by differentially changing the voltage on the drive electrodes to rebalance Coriolis torque. The feedback signal is demodulated in phase with the drive axis signal (K&ohgr;⊖x) to produce a measure of the Coriolis force.
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机译:一种通过控制电压(V TY Sub>)进行闭环操作的微型陀螺仪( 10 B>),该控制电压由感测电极(S 1 B>,S 2 B>),提供科里奥利扭矩重新平衡,以防止微型陀螺仪( 10 B>)在输出轴(y轴)上位移。本发明为微型陀螺仪( 10 B>)提供了宽带,闭环操作,并且允许将驱动频率紧密地调谐到高Q感测轴谐振。通过差分改变驱动电极上的电压以重新平衡科里奥利扭矩,可以补偿并反馈差分传感信号(S 1 B>&负; S 2 B>)。反馈信号与驱动轴信号(K &ohgr; Sub>⊖ x Sub>)同相解调,以测量科里奥利力。
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