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Process for fabricating copper interconnect for ULSI integrated circuits
Process for fabricating copper interconnect for ULSI integrated circuits
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机译:用于ULSI集成电路的铜互连的制造方法
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摘要
A method for manufacturing integrated circuits; particularly, a method for fabricating a copper interconnect system and a copper interconnect system, having a layer of CrO, fabricated by the method.
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