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Projection having a micro-aperture, probe or multi-probe having such a projection and surface scanner, aligner or information processor comprising such a probe
Projection having a micro-aperture, probe or multi-probe having such a projection and surface scanner, aligner or information processor comprising such a probe
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机译:具有微孔,探针或多探针的投射物,具有这种投射物和包括这种探针的表面扫描仪,对准器或信息处理器
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摘要
A projection having a micro-aperture on the tip is formed. Firstly, a projection or a dent is formed on a substrate. Then, a film is formed on the surface of the projection or of the opposite side of the dent so as to make the film thin at and near the tip of the projection or the dent. The film is subsequently etched to expose the tip, which is further etched to produce a micro-aperture. Preferably, the film is formed of a thermo-plastic material such as glass, especially phospho-silicate glass to produce a viscous flow under heated conditions. The probe having a micro-aperture can be used for a surface scanner, an aligner or an information processor.
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