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Methods for and products of modification and metallization of oxidizable surfaces, including diamond surfaces, by plasma oxidation

机译:通过等离子体氧化对包括金刚石表面在内的可氧化表面进行改性和金属化的方法和产品

摘要

The present invention concerns a process for modifying oxidizable surfaces, including diamond surfaces, including methods for metallizing these surfaces, where these methods include oxidation of these surfaces. The present invention also relates to the products of these methods.;In this process, a surface is first plasma oxidized, usually under an RF O2 plasma. Chemical functional groups are then attached to the surface. If the surface is to be metallized, the chemical functional groups are selected to be catalyzable, the surface is then catalyzed for electroless metallization, and the surface is finally treated with an electroless plating solution to metallize the surface.;If modified surface is to be patterned, the modified surface is exposed through a mask to pattern the surface after the attachment of the chemical functional groups.
机译:本发明涉及一种修饰包括金刚石表面的可氧化表面的方法,包括使这些表面金属化的方法,其中这些方法包括这些表面的氧化。本发明还涉及这些方法的产物。在该过程中,通常首先在RF O 2 等离子体下对表面进行等离子氧化。然后将化学官能团连接至表面。如果要对表面进行金属化处理,则选择要催化的化学官能团,然后将其催化进行化学镀金属处理,最后用化学镀溶液处理表面以对表面进行金属处理。图案化后,修饰的表面通过掩模暴露,以在化学官能团连接后对表面进行图案化。

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