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System and method for measuring the size of a focused optical spot
System and method for measuring the size of a focused optical spot
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机译:用于测量聚焦光斑尺寸的系统和方法
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摘要
A system for measuring a size of a focused spot of an optical energy beam. The system includes a grating, a beam scanner oriented between a source of the optical energy beam and the grating, and a detector oriented to sense a diffraction pattern of the grating.
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