ELECTROSTATIC CHUCK METHOD FOR ATTRACTING ELECTROSTATICALLY CHARGED BEADS ONTO A BEAD COLLECTING TERRITORY ON BEAD CONTACT SURFACE AND A MONITORING CIRCUIT HAVING CHARGE SENSOR ELECTRODE FOR SENSING ACCUMULATED CHARGE ON BEAD COLLECTING TERRITORY ON ...

摘要

AC waveforms biasing of bead transporter chucks and their accumulated charge sensing circuits tailored for low resistivity substrates and beads where if traditional DC quasi-static biasing potentials were used, the bead attraction potentials of the chuck would undergo rapid RC decay and cause the bead transporter chuck to stop working. Methods for selecting AC waveforms are given, including those that maximize the time average of the bead attraction potential at the bead collection zone of the bead contact surface.