首页>
外国专利>
APPARATUS FOR (ELECTROSTATIC SPREADING OF PARTICLES TO THE SURFACE OF)A PLANAR SUBSTRATE, ELECTROSTATIC SPREADING APPARATUS AND METHOD FOR ELECTROSTATIC SPREADING OF PARTICLES TO THE SURFACE OF A PLANAR SUBSTRATE
APPARATUS FOR (ELECTROSTATIC SPREADING OF PARTICLES TO THE SURFACE OF)A PLANAR SUBSTRATE, ELECTROSTATIC SPREADING APPARATUS AND METHOD FOR ELECTROSTATIC SPREADING OF PARTICLES TO THE SURFACE OF A PLANAR SUBSTRATE
展开▼
机译:平面基质的粒子的(静电扩散)装置,静电扩散装置和平面基质的粒子的静电扩散方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
The disclosure relates to an apparatus for electrostatically adhering grains to a planar substrate comprising:a. an electrostatic chuck having a collection surface with at least one grain collection zone for, when the planar substrate is layered on the collection surface, electrostatically directing charged grains to a corresponding surface on the planar substrate; andb. a pattern of holes through the electrostatic chuck allowing a source of low pressure to act through the electrostatic chuck to adhere the planar substrate.
展开▼