FULLY INTEGRATED THERMAL INKJET PRINTHEAD HAVING MULTIPLE INK FEED HOLES PER NOZZLE

摘要

Described herein is a monolithic printhead formed using integrated circuit techniques.Thin film layers (24, 40-50), including ink ejection elements (24, 62), are formed on a topsurface of a silicon substrate (20). The various layers are etched to provide conductive leads (25)to the ink ejection elements (24, 62). At least one ink feed hole (26, 66, 67) is formed throughthe thin film layers for each ink ejection chamber (30). In one embodiment, there are more inkfeed holes (26, 66, 67) than ink ejection chambers (30), so that more than one ink feed holeprovides ink to each ink ejection chamber. A trench (36) is etched in the bottom surface of thesubstrate (20) so that ink (38) can flow into the trench and into each ink ejection chamber (30)through the ink feed holes (26, 66, 67) formed in the thin film layers. An orifice layer (28) isformed on the top surface of the thin film layers to define the nozzles (34) and ink ejectionchambers (24, 62).