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Information processing apparatus effecting probe position control with electrostatic forces
Information processing apparatus effecting probe position control with electrostatic forces
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机译:利用静电力实现探针位置控制的信息处理设备
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摘要
An information processing apparatus utilizing a scanning tunnel microscope includes a probe, a detector for detecting the distance between the probe and an object opposed thereto, based on a physical interaction working between the probe and the object, an electrostatic actuator for displacing the probe, for adjusting the distance between the probe and the object: The electrostatic actuator includes mutually opposed two electrodes: A controller is provided for controlling the amount of charge to be accumulated between the electrodes, so as to maintain a desired distance between the probe and the object, based on the result of detection by the detector. IMAGE
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