The invention concerns a method for quantitative and selective analysis concerning the volatility of volatile contaminating compounds present in a gas mixture, by infrared spectroscopy, in particular by Multiple Internal Reflection (MIR) infrared spectroscopy, which consists in: a) sweeping with the gas mixture at a temperature T, the surface of a substrate or sensor for infrared spectroscopy brought to a specific temperature T1, for example, different from temperature T, whereby only the least volatile contaminating compounds and having mole weights higher than a specific mole weight are deposited on the surface of the substrate or sensor; b) analysing by infrared spectroscopy the deposited contaminating compounds; then c) bringing the substrate or sensor successively to several specific temperatures from T1 to Tn, higher than room temperature, sweeping each time with the gas mixture the surface of the substrate or sensor, and, each time, simultaneously and/or consecutively, analysing the deposited contaminating compounds, whereby the mass spectrum of the volatile contaminating compounds is obtained.
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