METHOD FOR THE PRODUCTION OF A FUNCTIONAL COATING BY MEANS OF A HIGH-FREQUENCY ICP PLASMA BEAM SOURCE

摘要

A method for the production of a functional coating on a substrate (19), arranged in a chamber (40), is disclosed, whereby a plasma (21) is generated by means of an inductively-coupled, high-frequency plasma beam source (5) with a burner body (25) with an outlet opening (26), defining a plasma generation chamber (27). Said plasma (21) passes through the outlet opening in the form of a plasma beam (20) from the plasma beam source (5) into the chamber (40) connected thereto, where the above impinges on the substrate (19) to produce the functional coating. Furthermore, a pressure gradient is at least intermittently generated between the interior of the chamber (40) and the plasma generation chamber, which generates an acceleration of the particles contained in the plasma beam (20) onto the substrate (19).