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ATMOSPHERIC PRESSURE RF PLASMA SOURCE USING AMBIENT AIR AND COMPLEX MOLECULAR GASES
ATMOSPHERIC PRESSURE RF PLASMA SOURCE USING AMBIENT AIR AND COMPLEX MOLECULAR GASES
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机译:使用环境空气和复杂分子气体的大气压RF等离子体源
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摘要
An atomospheric pressure rf plasma processor (4) in which a plasma is created between two electrodes (2,8) using high frequency rf power (8), and a mixture of gases with a complex molecular gas as the majority component of the mixture of gases.
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