A multi-stage heating furnace for drying a large-sized substrate (V) arranged in a stack is disclosed and includes a furnace body (A) and self heaters (H1-H6) arranged inside the furnace body, Adjacent self-heating heaters partially separate the drying chambers (R1-R5) for accommodating the respective substrates, and the self-heating heaters (23) are embedded in the space And a panel heater has an opposite major surface covered with a respective thin ceramic layer that emits far infrared rays when the thermal barrier plate is heated by the excitation of the heating element.
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