AFM FOR MEASURING SURFACE ROUGHNESS OF TUBE-SHAPED SAMPLE

摘要

PURPOSE: An AFM(Atomic Force Microscope) for measuring surface roughness of tube-shaped sample is provided to measure the surface roughness of inner wall of the sample in an easy manner. CONSTITUTION: An AFM comprises a PZT scanner(40) positioned onto a tube-shaped sample(80); a vertical cantilever fixing table(50) installed underneath the PZT scanner; a cantilever(60) installed to have a predetermined tilt angle in a through hole formed at the lower portion of the vertical cantilever fixing table, wherein the cantilever has a probe(70) arranged at an end of the cantilever; and a sample fixing table(90) arranged beneath the tube-shaped sample, so as to fix the sample in a vertical direction.