Intermediate film and its shape measuring method, manufacturing process control method, manufacturing method, shape measuring device and manufacturing process control device

摘要

The present invention provides a method and apparatus for measuring and controlling the edge position and deposition portion of the deposited film, the position and width of the margin portion, or the position of the heavy edge, without the need for a skilled operator.;That is, in the present invention, the vapor deposition unit and the margin unit are alternately formed in the longitudinal direction in the margin forming apparatus and the metal deposition apparatus alternately in the longitudinal direction and in the width direction, and the vapor deposition film is moved by a film transfer system to emit light from the light source to the film. The light transmittance distribution in the width direction of the film in the film of this light beam is detected by a line sensor camera, and the position and width of the edge position and the deposition part, the margin part, or the width or heavy edge of the film based on the obtained light transmittance distribution. The position is measured and a margin forming apparatus, a metal deposition apparatus, or the like is controlled based on the result.