MEMS device having springs with non-linear restoring force

摘要

PURPOSE: A MEMS(Micro-Electro-Mechanical System) element having a non-linear restorative force spring is provided to enlarge the range of position controlling by using a spring element of non-linear restorative force, to obtain strong restorative force by using the spring when sticktion is generated, and to improve reliability by avoiding sticktion. CONSTITUTION: A MEMS element comprises a support element(20) formed on a substrate, a motion element(30) placed on the substrate and moving relative to the substrate, a spring element(40) to elastically suspend the motion element against the support element, a drive element to induce the relative motion of the motion element, and a stopper(60) to non-linearly increase the repulsive force of the spring element when the spring element is elastically deformed.