/ Piezoelectric/electrostrictive micro actuator using a mixture of ceramic powder and polyvinylidene fluoride and manufacturing method thereof

摘要

The invention non-explosive oxidation at a low temperature of 100-500 ℃ - is prepared by reducing the combustion reaction and particle size 5㎛ or less, lead (Pb), titanium (Ti), the basic member is formed with excellent piezoelectric Thoreau ceramic powder to a method that generates a production of superior polyvinylidene by using a mixture of fluoride produced by forming a film piezoelectric / electrostrictive piezoelectric / electrostrictive micro-actuator, and that the piezoelectric / electrostrictive micro-actuator, with improved colloidal process connectivity between the particles and to obtain the piezoelectric / electrostrictive micro-actuator, the mechanical strength of coordination and there is an effect that it is possible to achieve the low energy cost of the process and the screen process is a low temperature by being angry, simplified by use of the low-temperature co-fired ceramic powder.