Piezoelectric bimorph actuator for displacement control in high frequency band

摘要

The present invention relates to a piezoelectric bimorph actuator (Piezoelectric Bimorph Actuator) for the displacement control of the high frequency band, and more specifically, the conventional two-piece piezoelectric ceramic elements are bonded to both sides of the intermediate electrode plate to drive in the form of cantilever. In piezoelectric bimorph actuators, an outer metal plate having a higher Young's Moduli than a piezoelectric ceramic element is formed on both outer surfaces of the piezoelectric ceramic element, so that the displacement amount and the resonant frequency are high at the same applied voltage. There is.