Determining inclinations of deformations on two arranged surfaces used in e.g. production line, involves determining deviations in the patterns detected and repeatedly imaged based on arranged surfaces

摘要

The method involves detecting the patterns (23,24) which are repeatedly imaged as a result of different inclinations or deformations of two arranged surfaces (17,18). The inclinations or deformations of the surfaces are determined as a result of deviations in the patterns or desired image (20). The patterns are illuminated and imaged by arranging the surfaces on a light sensitive receiver on a focal plane (14).