Method for correction of scanning microscope images, by processing of beam position signals originating from beam deflectors together with detection signals arising from signals caused by light that has come from the object

摘要

Method for phase correction of position and detection signals for use in scanning microscopy has the following steps: (a) generation of a position signal from the position of a beam deflector (7) and production of a detection signal (21) from the light (17) originating from the object (15); (b) transfer of the position signal (25) and detection signal (21) to a processing unit (23); (c) determination of correction values and transfer of correction values to the processing unit for comparison of time differences between position and detection signals. Independent claims are included for the following: (1) a device for phase correction of position and detection signals from a scanning microscope; (2) a scanning microscope with phase correction.