Gas supply device used for very pure corrosive gases comprises functional element having plastic base body, plastic membrane and non-metallic surfaces in gas contact regions of element

摘要

A gas supply device comprises a functional element having a plastic base body (1), a plastic membrane (7) and non-metallic surfaces in the gas contact regions of the element. Preferred Features: The element is a membrane valve, multi-way valve, pressure regulator or safety valve. The element is connected to a plastic gas line. The base body has a part with a flat valve seat (6) in one region. The element contains one or more valve elements with a pneumatic upper part.