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Iris especially for exposure objective in semiconductor lithography equipment, has leaves which can be moved approximately linearly to the optical axis of the iris
Iris especially for exposure objective in semiconductor lithography equipment, has leaves which can be moved approximately linearly to the optical axis of the iris
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机译:虹膜,特别是用于半导体光刻设备中的曝光物镜的虹膜,其叶片可以相对于虹膜的光轴大致线性移动
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摘要
An iris has several leaves carried by guide elements, and are movable by drive device for adjusting the shutter opening. The guide elements (slot (5) and guide pins (4)) are designed so that the leaves (2) are movable, at least approximately, linearly to the radial direction of the optical axis of the iris (1) and each of the leaves (2) can be individually driven.
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