Illumination unit preferably for a microscope, in particular, a UV microscope comprises a reflection filter arrangement whose entry and exit beams are translationally and/or angularly offset relative to one another

摘要

The illumination unit preferably for a microscope, in particular, a UV microscope comprises a reflection filter arrangement whose entry and exit beams (11, 12) are translationally and/or angularly offset relative to one another. An Independent claim is also included for a microscope, in particular a semiconductor inspection or measuring microscope with such an illumination unit.