Substrate heating device using electromagnetic radiation has cooling medium feed with integrated flow channel directing cooling medium onto substrate outside heated area

摘要

The heating device has one or more electromagnetic radiation sources (1) and one or more reflectors (2) and incorporates a cooling medium feed (3), for circulating a gas or liquid cooling medium (4) around each electromagnetic radiation source and/or cooling ribs (8) of the reflectors. The cooling medium feed has one or more integrated flow channels (5) for increasing the flow velocity of the cooling medium flow and directing it onto the substrate (6) on the outside of the heated area.