首页> 外国专利> THERMAL MASS FLOW METER WORKING ACCORDING TO THE DIFFERENTIAL PRINCIPLE OF ELECTRICITY

THERMAL MASS FLOW METER WORKING ACCORDING TO THE DIFFERENTIAL PRINCIPLE OF ELECTRICITY

机译:根据电原理的不同,热质量流量计的工作原理

摘要

The disclosed mass flow transducer is of the type including a balanced bridge comprising two, substantially identical, thermal elements forming two sides of the bridge between the top and the bottom of the bridge, the two elements being adapted to be positioned in two regions of a laminar flow tube in a symmetrical tandem arrangement so as to sense flow through the tube, one element being upstream from the other. The preferred transducer includes control means for monitoring the voltage at the top and bottom of the bridge and monitoring the current required to maintain the node between the thermal elements at virtual ground.
机译:所公开的质量流量换能器是包括平衡桥的类型的,该平衡桥包括两个基本相同的热元件,该热元件形成在桥的顶部和底部之间的桥的两侧,这两个元件适合于定位在两个区域中。呈对称串联布置的层流管,以感测流经该管的流量,一个元件位于另一个元件的上游。优选的换能器包括控制装置,用于监视桥的顶部和底部的电压并监视将热敏元件之间的节点保持在虚拟地所需的电流。

著录项

  • 公开/公告号DE69523540T2

    专利类型

  • 公开/公告日2002-06-27

    原文格式PDF

  • 申请/专利权人 MKS INSTRUMENTS INC. ANDOVER;

    申请/专利号DE19956023540T

  • 发明设计人 HINKLE D.;PROVOST JAMES;

    申请日1995-05-19

  • 分类号G01F1/698;G01F1/684;G01F1/68;

  • 国家 DE

  • 入库时间 2022-08-22 00:25:31

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