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Portable telephone electromechanical resonator having strongly doped monocrystalline silicon two end isolating zones held with spaced central active zone.
Portable telephone electromechanical resonator having strongly doped monocrystalline silicon two end isolating zones held with spaced central active zone.
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机译:便携式电话机电谐振器,其具有强掺杂的单晶硅,其两个端部隔离区保持有隔开的中央有源区。
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摘要
The electromechanical resonator has an active zone (1) made of strongly doped monocrystalline silicon making a first electrode. There are isolating zones (2) carrying the monocrystalline silicon and leaving a central spaced zone.
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