Magnetic thin film, its manufacturing method, evaluation method thereof, magnetic head, magnetic recording apparatus and magnetic device using the same

摘要

The present invention can be fabricated by the same dry process as the magnetoresistive element forming the reproducing head, and has a soft magnetic characteristic having a saturation magnetic flux density of 2T or more and a coercive force of less than 2oe, which is suitable for the magnetic pole material of the recording head, and its manufacture A method and a magnetic head, a magnetic recording apparatus and a magnetic device using the method are provided. The magnetic thin film according to the present invention is characterized in that a martensite (. Alpha. -) phase is the main phase, and is a carbonized iron film having at least carbon and iron as constituent elements. The iron carbide film is preferably formed of an. Alpha. 'phase single phase. This iron carbide film is a magnetic thin film specified by the diffraction peak from the (002) plane of the. Alpha. 'phase by X-ray diffraction or electron diffraction method. The hard axis of magnetization is substantially perpendicular to the film plane, and the magnetization easy plane is substantially horizontal to the film plane.