Have the suffering evaluation component the high integrated circuit tip/chip and its suffering evaluation component inspection modulo

摘要

PROBLEM TO BE SOLVED: To provide a high integrated circuit chip having an element to be evaluated which can secure an empty space on a chip relatively easily without causing a drop of its integration density, and also to provide a method of inspecting the element.;SOLUTION: In the high integrated circuit chip which can test electrical characteristics of an element to be evaluated formed on the chip via a probe electrode pad contacted by an inspecting probe, the elements to be evaluated with respect to electronic function elements provided on the chip are collectively provided in an empty area around an internal cell region, electrode pads for a probe common thereto are provided, and gaps for securing routes necessary for connection wiring with the electrode pads are provided to the empty area.;COPYRIGHT: (C)2001,JPO