Ray tracking type laser interferometer length measuring machine by swinging motion light lever

摘要

PROBLEM TO BE SOLVED: To provide a light tracking laser interferometer for measuring range capable of minimizing the movement of the origin of interference measurement even in the case that an optical axis orientation is changed.;SOLUTION: A light lever with oscillational movement is disposed in an optical path of an interference optical system, and a laser light is projected on the center of reflective surface of the optical lever with oscillational movement. A reflected light can be changed in arbitrary directions by controlling the optical lever with oscillational movement. The reflected light is projected onto a retro-reflector as an object to be measured, and the tracking is carried out.;COPYRIGHT: (C)2002,JPO