The internal switching of the CMOS circuit and measures other dynamic parameter the non invasive Characteristic optical manner

摘要

PROBLEM TO BE SOLVED: To determine the switching time of an element in an integrated circuit and other dynamic information by acquiring a periodic optical emission from the integrated circuit operating with a time variant internal current and analyzing the optical emission. ;SOLUTION: A microscope 2 is arranged in a dark space 1 and an imaging optical detector 3, e.g. a charge coupled element, is arranged on the focus plane of the microscope 2. A semiconductor integrated circuit 5 to be evaluated is then mounted in the microscope 2 and fed with power from an appropriate power supply. Subsequently, light emitted from a single part of the semiconductor integrated circuit 5 is received by an optical probe and detected by an optical detector 6 before an optical waveform is measured by means of a reader 8. On the other hand, a periodic optical emission from the semiconductor integrated circuit 5 is received by the imaging optical detector 3 and read out by means of a reader 7 which analyzes and outputs information related to the semiconductor integrated circuit 5.;COPYRIGHT: (C)1998,JPO