Heat sensitive Characteristic optical material, formation manner and exoergic image measurement manner null of heat sensitive Characteristic optical coat and heat sensitive Characteristic optical

摘要

PROBLEM TO BE SOLVED: To obtain a heat-sensitive optical material being useful in the leak analysis of semiconductor integrated circuit devices, having high temperature difference resolution and high space resolution, used in the measurement of heat-generating images and having a heat-sensitive temperature range in which the light transmittance varies with the temperature by dispersing an acid color- developing substance, an acid substance and a heat-sensitivity-controlling substance in an inert binder polymer. ;SOLUTION: This material desirably comprises 100 pts.wt. inert binder polymer, 10 to below 25 pts.wt. heat-sensitivity-controlling substance, 2 to below 8 pts.wt. acid color developing substance and an acid substance in an amount at least equivalent to below fourfold amount of the acid color-developing substance. The inert binder polymer is particularly desirably polystyrene or poly-α- methylstyrene. The acid color-developing substance is exemplified by Crystal Violet Lactone or the like, the acid substance is exemplified by bisphenol A or the like, and the heat-sensitivity-controlling substance is exemplified by myristyl alcohol or cetyl alcohol or the like.;COPYRIGHT: (C)1998,JPO